发明申请
- 专利标题: COMMON LASER MODULE FOR A PHOTOVOLTAIC PRODUCTION LINE
- 专利标题(中): 用于光伏生产线的通用激光模块
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申请号: US12559838申请日: 2009-09-15
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公开(公告)号: US20110065227A1公开(公告)日: 2011-03-17
- 发明人: Tzay-Fa Su , David Morishige , David Tanner , Chris Eberspacher
- 申请人: Tzay-Fa Su , David Morishige , David Tanner , Chris Eberspacher
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L31/18
- IPC分类号: H01L31/18 ; B23K26/00
摘要:
Embodiments of the present invention generally relate to an automated production line using a common laser scribe module for providing consistent scribe lines in multiple layers during the formation of thin film photovoltaic modules. The common laser scribe module includes a plurality of identical, programmable laser tools configured to emit radiation at a common wavelength. Substrates flowing through the production line are tracked by a system controller, which identifies available laser tools within the common laser scribe module and routes substrates to available tools for scribing features in one or more layers disposed on the substrates. The system controller also sets and controls laser parameters, such as power, pulse frequency, pulse width, and laser pattern, in order to accurately and consistently produce scribed lines in the appropriate material layer of the substrate.
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