Invention Application
US20110069366A1 OPTICAL DEFLECTION DEVICE FOR SCANNING, OPHTHALMOLOGIC MEASUREMENT AND THERAPY SYSTEM 有权
用于扫描,光学测量和治疗系统的光学偏转装置

OPTICAL DEFLECTION DEVICE FOR SCANNING, OPHTHALMOLOGIC MEASUREMENT AND THERAPY SYSTEM
Abstract:
An optical deflection unit for targeted radiation, e.g., produced by laser or superluminescent diodes, in scanning, ophthalmological measuring and therapy systems, comprises a deflection mirror, a position sensor and a control unit, which form a control circuit for minimizing the deviation of the actual positions, detected by the position sensor, from the desired positions of the deflection mirror, whereby the optical deflection unit comprises a deflection mirror, oscillatingly movable by means of non-contacting electromagnetic drives around at least one rotation axis, and which is positioned in the direction of the, at least, one rotation axis between at least two bearings. The optical deflection unit is designed may also be used for beam guidance in high and ultrahigh vacuum installations, such as UV and EUV exposure installations for semiconductor lithography.
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