发明申请
- 专利标题: Hydrogen Passivation of Integrated Circuits
- 专利标题(中): 集成电路的氢钝化
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申请号: US12890137申请日: 2010-09-24
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公开(公告)号: US20110079884A1公开(公告)日: 2011-04-07
- 发明人: Gul B. Basim , Scott R. Summerfelt , Ted S. Moise
- 申请人: Gul B. Basim , Scott R. Summerfelt , Ted S. Moise
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L21/768 ; H01L21/31
摘要:
An integrated circuit with a passivation trapping layer. An integrated circuit with a hydrogen or deuterium releasing layer underlying a passivation trapping layer. Method for forming an integrated circuit having a hydrogen or deuterium releasing layer. Method for forming an integrated circuit having a passivation trapping layer.
公开/授权文献
- US08669644B2 Hydrogen passivation of integrated circuits 公开/授权日:2014-03-11
信息查询
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