发明申请
US20110085152A1 Vibration control apparatus, vibration control method, exposure apparatus, and device manufacturing method
审中-公开
振动控制装置，振动控制方法，曝光装置和装置的制造方法
- 专利标题： Vibration control apparatus, vibration control method, exposure apparatus, and device manufacturing method
- 专利标题（中）： 振动控制装置，振动控制方法，曝光装置和装置的制造方法
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申请号： US12775022申请日： 2010-05-06
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公开(公告)号： US20110085152A1公开(公告)日： 2011-04-14
- 发明人: Hideaki Nishino , Hiroshi Shirasu
- 申请人： Hideaki Nishino , Hiroshi Shirasu
- 优先权： JPP2009-112559 20090507
- 主分类号： G03B27/58
- IPC分类号： G03B27/58 ; F16F7/00 ; G03F7/20
摘要：
A vibration control apparatus suppresses a vibration of a structure which is vibrated. The vibration control apparatus includes: a vibration isolation apparatus that supports the structure and suppresses a transmission of a vibration to the structure, the vibration having an amplitude equal to or less than a first amplitude in a predetermined direction; and a damping apparatus that damps a vibration of the structure vibrating in the predetermined vibration direction with a second amplitude larger than the first amplitude, to thereby reduce the vibration to equal to or less than the first amplitude.
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