发明申请
- 专利标题： TOUCH PANEL MANUFACTURING METHOD AND FILM FORMATION APPARATUS
- 专利标题（中）： 触控面板制造方法和薄膜形成装置
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申请号： US13000105申请日： 2009-07-03
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公开(公告)号： US20110089026A1公开(公告)日： 2011-04-21
- 发明人: Hirohisa Takahashi , Satoru Ishibashi
- 申请人： Hirohisa Takahashi , Satoru Ishibashi
- 申请人地址： JP Chigasaki-shi
- 专利权人： ULVAC, INC.
- 当前专利权人： ULVAC, INC.
- 当前专利权人地址： JP Chigasaki-shi
- 优先权： JPP2008-179372 20080709
- 国际申请： PCT/JP2009/062206 WO 20090703
- 主分类号： C23C14/34
- IPC分类号： C23C14/34
摘要：
A touch panel manufacturing method is a method for manufacturing a touch panel including a transparent substrate having a main surface on which a transparent-electroconductive film is formed. The transparent-electroconductive film is formed on the main surface of the transparent substrate by carrying out sputtering using a target made of a zinc oxide-based material in a reactive gas atmosphere containing two or three gases selected from a group consisting of hydrogen gas, oxygen gas, and water vapor.
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