发明申请
- 专利标题: PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING A DISPLAY SUBSTRATE USING THE SAME
- 专利标题(中): 光电组合物及使用其制造显示基板的方法
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申请号: US12891940申请日: 2010-09-28
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公开(公告)号: US20110097835A1公开(公告)日: 2011-04-28
- 发明人: Jeong-Min PARK , Jung-Soo LEE , Won-Young CHANG , Eun-Sang LEE , In-Ho YU , Seong-Hyeon KIM
- 申请人: Jeong-Min PARK , Jung-Soo LEE , Won-Young CHANG , Eun-Sang LEE , In-Ho YU , Seong-Hyeon KIM
- 申请人地址: KR Suwon-si KR Seoul
- 专利权人: SAMSUNG ELECTRONICS CO., LTD,DONGWOO FINE-CHEM
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD,DONGWOO FINE-CHEM
- 当前专利权人地址: KR Suwon-si KR Seoul
- 优先权: KR2009-0101988 20091027
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; G03F7/004 ; G03F7/20
摘要:
A photoresist composition includes an alkali-soluble resin, a dissolution inhibitor including a quinone diazide compound, a first additive including a benzenol compound represented by the following Chemical Formula 1, a second additive including an acrylic copolymer represented by the following Chemical Formula 2 and an organic solvent. Accordingly, heat resistance of a photoresist pattern may be improved, and the photoresist pattern may be readily stripped. As a result, crack formation in the photoresist pattern may be reduced and/or prevented.
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