Invention Application
US20110108725A1 NON-DESTRUCTIVE, HIGH ORDER HARMONIC ION MOTION IMAGE CURRENT DETECTION 失效
非破坏性,高阶谐波离子运动图像电流检测

NON-DESTRUCTIVE, HIGH ORDER HARMONIC ION MOTION IMAGE CURRENT DETECTION
Abstract:
The invention herein generally relates to non-destructive, high order harmonic ion motion image current detection. In certain embodiments, ion motion corresponding to high order harmonic frequencies, instead of the secular frequencies, is detected using image current detection with a constant excitation applied to the waveform signal.
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