发明申请
- 专利标题: OPTICAL POSITION MEASURING DEVICE
- 专利标题(中): 光学位置测量装置
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申请号: US12995070申请日: 2009-03-31
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公开(公告)号: US20110109917A1公开(公告)日: 2011-05-12
- 发明人: Ulrich Benner
- 申请人: Ulrich Benner
- 申请人地址: DE Traunreut
- 专利权人: Johanes Heidenhain GmbH
- 当前专利权人: Johanes Heidenhain GmbH
- 当前专利权人地址: DE Traunreut
- 优先权: DE102008025870.9 20080531
- 国际申请: PCT/EP2009/053797 WO 20090331
- 主分类号: G01B11/14
- IPC分类号: G01B11/14
摘要:
A measuring device for detecting a relative position, the measuring device including a measurement graduation movable in at least one measurement direction and a scanning unit for determining a relative position of the measurement graduation with respect to the scanning unit. The scanning unit includes a light source, a scanning grating disposed on a first side of a transparent carrier element that is positioned in a scanning beam path and a detector arrangement. The scanning unit further includes an attenuation structure that adjusts a light intensity on the detector arrangement in a defined manner, wherein either 1) the attenuation structure is disposed on a second side, opposite the first side, of the transparent carrier element or 2) the attenuation structure has a permeability that varies as a function of location at least along one direction so that a light intensity which is uniform at least in that one direction results on the detector arrangement.
公开/授权文献
- US08537370B2 Optical position measuring device 公开/授权日:2013-09-17
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