发明申请
US20110111349A1 RESIN COMPOSITION FOR MAKING RESIST PATTERN INSOLUBLE, AND METHOD FOR FORMATION OF RESIST PATTERN BY USING THE SAME
有权
用于制造耐腐蚀图案的树脂组合物,以及使用它们形成耐力图案的方法
- 专利标题: RESIN COMPOSITION FOR MAKING RESIST PATTERN INSOLUBLE, AND METHOD FOR FORMATION OF RESIST PATTERN BY USING THE SAME
- 专利标题(中): 用于制造耐腐蚀图案的树脂组合物,以及使用它们形成耐力图案的方法
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申请号: US13004898申请日: 2011-01-12
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公开(公告)号: US20110111349A1公开(公告)日: 2011-05-12
- 发明人: Gouji WAKAMATSU , Masafumi Hori , Kouichi Fujiwara , Makoto Sugiura
- 申请人: Gouji WAKAMATSU , Masafumi Hori , Kouichi Fujiwara , Makoto Sugiura
- 申请人地址: JP Tokyo
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-183038 20080714
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; C08L37/00
摘要:
A resist pattern-insolubilizing resin composition is used in a resist pattern-forming method. The resist pattern-insolubilizing resin composition includes solvent and a resin. The resin includes a first repeating unit that includes a hydroxyl group in its side chain and at least one of a second repeating unit derived from a monomer shown by a following formula (1-1) and a third repeating unit derived from a monomer shown by a following formula (1-2), wherein for example, R1 represents a hydrogen atom, A represents a methylene group, R2 represents a group shown by a following formula (2-1) or a group shown by a following formula (2-2), R3 represents a methylene group, R4 represents a hydrogen atom, and n is 0 or 1, wherein each of R34 represents at least one of a hydrogen atom and a linear or branched alkyl group having 1 to 10 carbon atoms.
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