发明申请
US20110111584A1 SRAM CELL HAVING A RECTANGULAR COMBINED ACTIVE AREA FOR PLANAR PASS GATE AND PLANAR PULL-DOWN NFETS
有权
具有平面通孔和平面拉低NFET的矩形组合有源区的SRAM单元
- 专利标题: SRAM CELL HAVING A RECTANGULAR COMBINED ACTIVE AREA FOR PLANAR PASS GATE AND PLANAR PULL-DOWN NFETS
- 专利标题(中): 具有平面通孔和平面拉低NFET的矩形组合有源区的SRAM单元
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申请号: US13005894申请日: 2011-01-13
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公开(公告)号: US20110111584A1公开(公告)日: 2011-05-12
- 发明人: Xiangdong Chen , Shang-Bin Ko , Dae-Gyu Park
- 申请人: Xiangdong Chen , Shang-Bin Ko , Dae-Gyu Park
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/28
- IPC分类号: H01L21/28
摘要:
A planar pass gate NFET is designed with the same width as a planar pull-down NFET. To optimize a beta ratio between the planar pull-down NFET and an adjoined planar pass gate NFET, the threshold voltage of the planar pass gate NFET is increased by providing a different high-k metal gate stack to the planar pass gate NFET than to the planar pull-down NFET. Particularly, a threshold voltage adjustment dielectric layer, which is formed over a high-k dielectric layer, is preserved in the planar pass gate NFET and removed in the planar pull-down NFET. The combined NFET active area for the planar pass gate NFET and the planar pull-down NFET is substantially rectangular, which enables a high fidelity printing of the image of the combined NFET active area by lithographic means.
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