发明申请
US20110111584A1 SRAM CELL HAVING A RECTANGULAR COMBINED ACTIVE AREA FOR PLANAR PASS GATE AND PLANAR PULL-DOWN NFETS 有权
具有平面通孔和平面拉低NFET的矩形组合有源区的SRAM单元

SRAM CELL HAVING A RECTANGULAR COMBINED ACTIVE AREA FOR PLANAR PASS GATE AND PLANAR PULL-DOWN NFETS
摘要:
A planar pass gate NFET is designed with the same width as a planar pull-down NFET. To optimize a beta ratio between the planar pull-down NFET and an adjoined planar pass gate NFET, the threshold voltage of the planar pass gate NFET is increased by providing a different high-k metal gate stack to the planar pass gate NFET than to the planar pull-down NFET. Particularly, a threshold voltage adjustment dielectric layer, which is formed over a high-k dielectric layer, is preserved in the planar pass gate NFET and removed in the planar pull-down NFET. The combined NFET active area for the planar pass gate NFET and the planar pull-down NFET is substantially rectangular, which enables a high fidelity printing of the image of the combined NFET active area by lithographic means.
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