发明申请
US20110114849A1 SYSTEM AND METHOD FOR MANIPULATING AN ION BEAM 有权
用于操纵离子束的系统和方法

SYSTEM AND METHOD FOR MANIPULATING AN ION BEAM
摘要:
A system for manipulating an ion beam having a principal axis includes an upper member having a first and a second coil generally disposed in different regions of the upper member and configured to conduct, independently of each other, a first and a second current, respectively. A lower member includes a third and a fourth coil that are generally disposed opposite to respective first and second coils and are configured to conduct, independently of each other, a third and a fourth current, respectively. A lens gap is defined between the upper and lower members, and configured to transmit the ion beam, wherein the first through fourth currents produce a 45 degree quadrupole field that exerts a rotational force on the ion beam about its principal axis.
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