Invention Application
- Patent Title: LDMOS transistor with asymmetric spacer as gate
- Patent Title (中): LDMOS晶体管采用非对称间隔器作为栅极
-
Application No.: US12592011Application Date: 2009-11-18
-
Publication No.: US20110115017A1Publication Date: 2011-05-19
- Inventor: Martin Alter , Paul Moore
- Applicant: Martin Alter , Paul Moore
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/336 ; H01L27/088

Abstract:
The present invention provides a laterally diffused metal oxide semiconductor (LDMOS) transistor and a method for fabricating it. The LDMOS transistor includes an n-type epitaxial layer formed on a p-type substrate, and an asymmetric conductive spacer which acts as its gate. The LDMOS transistor also includes a source and a drain region on either side of the asymmetric conductive spacer, and a channel region formed by ion-implantation on the asymmetric conductive spacer. The height of the asymmetric conductive spacer increases from the source region to the drain region. The channel region is essentially completely under the asymmetric conductive spacer and has smaller length than that of the channel region of the prior art LDMOS transistors. The LDMOS transistor of the present invention also includes a field oxide layer surrounding the active region of the transistor, and a thin dielectric layer isolating the asymmetric conductive spacer from the n-type epitaxial layer.
Public/Granted literature
- US08525257B2 LDMOS transistor with asymmetric spacer as gate Public/Granted day:2013-09-03
Information query
IPC分类: