发明申请
US20110127599A1 Split Gate Non-volatile Flash Memory Cell Having A Floating Gate, Control Gate, Select Gate And An Erase Gate With An Overhang Over The Floating Gate, Array And Method Of Manufacturing
审中-公开
具有浮动门的分闸门非易失性闪存单元，控制门，选择门和具有悬浮在浮动门上的擦除门，阵列和制造方法
- 专利标题： Split Gate Non-volatile Flash Memory Cell Having A Floating Gate, Control Gate, Select Gate And An Erase Gate With An Overhang Over The Floating Gate, Array And Method Of Manufacturing
- 专利标题（中）： 具有浮动门的分闸门非易失性闪存单元，控制门，选择门和具有悬浮在浮动门上的擦除门，阵列和制造方法
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申请号： US13023443申请日： 2011-02-08
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公开(公告)号： US20110127599A1公开(公告)日： 2011-06-02
- 发明人: Xian Liu , Amitay Levi , Alexander Kotov , Yuri Tkachev , Viktor Markov , James Yingbo Jia , Chien-Sheng Su , Yaw Wen Hu
- 申请人： Xian Liu , Amitay Levi , Alexander Kotov , Yuri Tkachev , Viktor Markov , James Yingbo Jia , Chien-Sheng Su , Yaw Wen Hu
- 主分类号： H01L29/788
- IPC分类号： H01L29/788
摘要：
An improved split gate non-volatile memory cell is made in a substantially single crystalline substrate of a first conductivity type, having a first region of a second conductivity type, a second region of the second conductivity type, with a channel region between the first region and the second region in the substrate. The cell has a select gate above a portion of the channel region, a floating gate over another portion of the channel region, a control gate above the floating gate and an erase gate adjacent to the floating gate. The erase gate has an overhang extending over the floating gate. The ratio of the dimension of the overhang to the dimension of the vertical separation between the floating gate and the erase gate is between approximately 1.0 and 2.5, which improves erase efficiency.
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