发明申请
- 专利标题: Deposition apparatus and method of manufacturing organic light emitting device using the same
- 专利标题(中): 使用该有机发光装置的沉积装置和制造方法
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申请号: US12801601申请日: 2010-06-16
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公开(公告)号: US20110129596A1公开(公告)日: 2011-06-02
- 发明人: Jung-Min Lee , Choong-Ho Lee , Yoon-Chan Oh , Soo-Jin Park
- 申请人: Jung-Min Lee , Choong-Ho Lee , Yoon-Chan Oh , Soo-Jin Park
- 申请人地址: KR Yongin-City
- 专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人地址: KR Yongin-City
- 优先权: KR10-2009-0117833 20091201
- 主分类号: B05D5/12
- IPC分类号: B05D5/12 ; B05C9/00 ; B05D3/00
摘要:
A deposition apparatus that improves deposition characteristics and the uniformity of a deposited layer, and a method of manufacturing an organic light emitting device using the deposition apparatus. The deposition apparatus includes: a base; a heat blocking layer formed on the base; a heat emitting layer patterned into stripes and formed on the heat blocking layer to heat a deposition material to be deposited; and a barrier rib formed and patterned on the heat blocking layer to define a space in which the deposition material is disposed.
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