发明申请
- 专利标题: FOCAL POSITION DETECTING APPARATUS AND METHOD
- 专利标题(中): 焦点位置检测装置和方法
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申请号: US12703894申请日: 2010-02-11
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公开(公告)号: US20110134416A1公开(公告)日: 2011-06-09
- 发明人: Shun-Sheng Ke , Meng-Che Tsai , Yang-Cheng Lin , Pin-Hao Hu , Yu-Hsiu Chang
- 申请人: Shun-Sheng Ke , Meng-Che Tsai , Yang-Cheng Lin , Pin-Hao Hu , Yu-Hsiu Chang
- 申请人地址: TW HSINCHU
- 专利权人: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人地址: TW HSINCHU
- 优先权: TWTW098142025 20091209
- 主分类号: G01J1/00
- IPC分类号: G01J1/00 ; G01B11/26
摘要:
A focal position detecting apparatus, for detecting a focusing condition and a tilting condition of an object, includes a planar beam generating module, an optical system, an optical sensor and a cylindrical lens. The planar beam generating module generates a planar light beam along a first path. The optical system is disposed on the first path, wherein the planar light beam, reflected by the object, passes through the optical system along a second path. The optical sensor is disposed on the second path. The cylindrical lens is disposed on the second path between the optical system and the optical sensor and an axis of the cylindrical lens is perpendicular to the second path. The planar light beam passes through the optical system and the cylindrical lens along the second path, before it is incident on the optical sensor to form a linear light spot for determining defocusing degree.
公开/授权文献
- US08456651B2 Focal position detecting method 公开/授权日:2013-06-04