发明申请
- 专利标题: Micro-Electro-Mechanical System Tiltable Lens
- 专利标题(中): 微机电系统倾斜透镜
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申请号: US12632040申请日: 2009-12-07
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公开(公告)号: US20110134504A1公开(公告)日: 2011-06-09
- 发明人: John J. Ellis-Monaghan , Jeffrey P. Gambino , Kirk D. Peterson , Jed H. Rankin
- 申请人: John J. Ellis-Monaghan , Jeffrey P. Gambino , Kirk D. Peterson , Jed H. Rankin
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; G06F17/50 ; H01L21/30
摘要:
A tiltable micro-electro-mechanical (MEMS) system lens comprises a microscopic lens located on a front surface of a semiconductor-on-insulator (SOI) substrate and a semiconductor rim surrounding the periphery of the microscopic lens. Two horizontal semiconductor beams located at different heights are provided within a top semiconductor layer. The microscopic lens may be tilted by applying an electrical bias between the lens rim and one of the two semiconductor beams, thereby altering the path of an optical beam through the microscopic lens. An array of tiltable microscopic lenses may be employed to form a composite lens having a variable focal length may be formed. A design structure for such a tiltable MEMS lens is also provided.
公开/授权文献
- US08492807B2 Micro-electro-mechanical system tiltable lens 公开/授权日:2013-07-23