发明申请
US20110136313A1 Methods of Forming CMOS Transistors with High Conductivity Gate Electrodes
有权
用高导电性栅极电极形成CMOS晶体管的方法
- 专利标题: Methods of Forming CMOS Transistors with High Conductivity Gate Electrodes
- 专利标题(中): 用高导电性栅极电极形成CMOS晶体管的方法
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申请号: US12942763申请日: 2010-11-09
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公开(公告)号: US20110136313A1公开(公告)日: 2011-06-09
- 发明人: Jongwon Lee , Boun Yoon , Sang Yeob Han , Chae Lyoung Kim
- 申请人: Jongwon Lee , Boun Yoon , Sang Yeob Han , Chae Lyoung Kim
- 优先权: KR10-2009-0121108 20091208
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/8234
摘要:
Provided is a method for manufacturing a MOS transistor. The method comprises providing a substrate having a first active region and a second active region; forming a dummy gate stack on the first active region and the second active region, the dummy gate stack comprising a gate dielectric layer and a dummy gate electrode; forming source/drain regions in the first active region and the second active region disposed at both sides of the dummy gate stack; forming a mold insulating layer on the source/drain region; removing the dummy gate electrode on the first active region to form a first trench on the mold insulating layer; forming a first metal pattern to form a second trench at a lower portion of the first trench, and removing the dummy gate electrode on the second active region to from a third trench on the mold insulating layer; and forming a second metal layer in the second trench and the third trench to form a first gate electrode on the first active region and a second gate electrode on the second active region.
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