发明申请
US20110136317A1 Semiconductor device, method of fabricating the same, and semicondutor module, electronic circuit board, and electronic system including the device 审中-公开
半导体装置及其制造方法,半导体模块,电子电路板以及包括该装置的电子系统

Semiconductor device, method of fabricating the same, and semicondutor module, electronic circuit board, and electronic system including the device
摘要:
Example embodiments relate to a semiconductor device including an oxide dielectric layer and a non-oxide dielectric layer, a method of fabricating the device, and a semiconductor module, an electronic circuit board, and an electronic system including the device. The semiconductor device may include a lower electrode, an oxide dielectric layer disposed on the lower electrode, a non-oxide dielectric layer disposed on the oxide dielectric layer, and an upper electrode disposed on the non-oxide dielectric layer.
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