发明申请
US20110136317A1 Semiconductor device, method of fabricating the same, and semicondutor module, electronic circuit board, and electronic system including the device
审中-公开
半导体装置及其制造方法,半导体模块,电子电路板以及包括该装置的电子系统
- 专利标题: Semiconductor device, method of fabricating the same, and semicondutor module, electronic circuit board, and electronic system including the device
- 专利标题(中): 半导体装置及其制造方法,半导体模块,电子电路板以及包括该装置的电子系统
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申请号: US12659830申请日: 2010-03-23
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公开(公告)号: US20110136317A1公开(公告)日: 2011-06-09
- 发明人: Sang-Yeol Kang , Youn-Soo Kim , Jae-Hyoung Choi , Jae-Soon Lim , Min-Young Park , Suk-Jin Chung
- 申请人: Sang-Yeol Kang , Youn-Soo Kim , Jae-Hyoung Choi , Jae-Soon Lim , Min-Young Park , Suk-Jin Chung
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2009-0120778 20091207
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
Example embodiments relate to a semiconductor device including an oxide dielectric layer and a non-oxide dielectric layer, a method of fabricating the device, and a semiconductor module, an electronic circuit board, and an electronic system including the device. The semiconductor device may include a lower electrode, an oxide dielectric layer disposed on the lower electrode, a non-oxide dielectric layer disposed on the oxide dielectric layer, and an upper electrode disposed on the non-oxide dielectric layer.
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