发明申请
- 专利标题： APPARATUS AND SYSTEMS FOR INTEGRATED CIRCUIT DIAGNOSIS
- 专利标题（中）： 集成电路诊断的装置和系统
-
申请号： US13031022申请日： 2011-02-18
-
公开(公告)号： US20110139368A1公开(公告)日： 2011-06-16
- 发明人: Mark J. Williamson , Gurtej S. Sandhu , Justin R. Arrington
- 申请人： Mark J. Williamson , Gurtej S. Sandhu , Justin R. Arrington
- 主分类号： H01L21/306
- IPC分类号： H01L21/306
摘要：
Apparatus and systems provide a mechanism to examine physical properties and/or diagnose problems at a selected location of an integrated circuit. Such apparatus and systems can include a source of an energetic beam directed at the selected location. The apparatus and systems may be used to provide examination and/or diagnostic methods that may be used in areas smaller than one micron in diameter and that may be used to remove IC layers, either selectively or non-selectively, until a desired depth is obtained.
信息查询
IPC分类:
