发明申请
US20110139577A1 SURFACE ROUGHNESS FOR IMPROVED VACUUM PRESSURE FOR EFFICIENT MEDIA HOLD-DOWN PERFORMANCE 有权
用于改善真空压力的表面粗糙度,用于有效的介质保持性能

SURFACE ROUGHNESS FOR IMPROVED VACUUM PRESSURE FOR EFFICIENT MEDIA HOLD-DOWN PERFORMANCE
摘要:
Provided are vacuum transport systems, methods of making them and methods of transporting one or more objects. In accordance with various embodiments, there is a vacuum transport system including a vacuum plenum and one or more transport members configured to rotate around the vacuum plenum and wherein at least one of the one or more transport members can include a substrate, the substrate including a plurality of holes extending from a first side proximate to the vacuum plenum to a second side proximate to an object, wherein a surface of the second side comprises a textured surface having an average roughness Ra of about 2 μm to about 100 μm.
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