发明申请
- 专利标题： ION BEAM GENERATOR
- 专利标题（中）： 离子发生器
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申请号： US12897400申请日： 2010-10-04
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公开(公告)号： US20110139998A1公开(公告)日： 2011-06-16
- 发明人: Einstein Noel ABARRA , Yasushi MIURA , Eiji FUJIYAMA , Naoyuki SUZUKI , Yasuyuki TANEDA , Yasushi KAMIYA
- 申请人： Einstein Noel ABARRA , Yasushi MIURA , Eiji FUJIYAMA , Naoyuki SUZUKI , Yasuyuki TANEDA , Yasushi KAMIYA
- 申请人地址： JP Kawasaki-shi
- 专利权人： CANON ANELVA CORPORATION
- 当前专利权人： CANON ANELVA CORPORATION
- 当前专利权人地址： JP Kawasaki-shi
- 优先权： JP2009-284129 20091215
- 主分类号： H01J27/00
- IPC分类号： H01J27/00
摘要：
[Objective of the Invention] An ion beam generator, a thermal distortion in a grid assembly is reduced.[Structure to Solve the Objective] Thermal expansion coefficients αP, αM and αG, for a sidewall (1A) of a discharge chamber, mounting platform (40) and extraction grid electrode assembly (20) are selected to have a relation: αP>αM≧αG. For example, the material of discharge chamber sidewall is stainless steel o aluminum, the material of grids is Mo, W or C and the material of platform is Ti or Mo.
公开/授权文献
- US08378576B2 Ion beam generator 公开/授权日：2013-02-19
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