公开(公告)号：US4960073A

公开(公告)日：1990-10-02

申请号：US407187

申请日：1989-09-14

申请人： Yasuhiro Suzuki ,  Sumio Mori ,  Eiji Fujiyama ,  Masami Sasaki

发明人： Yasuhiro Suzuki ,  Sumio Mori ,  Eiji Fujiyama ,  Masami Sasaki

IPC分类号： H01L21/302 ,  C23C16/44 ,  C23C16/511 ,  C23F4/00 ,  H01J37/32 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/31 ,  H05H1/46

CPC分类号： H01J37/32357

摘要： A microwave plasma treatment apparatus comprises a plurality of auxiliary magnets arranged around the periphery of a plasma formation chamber. A plurality of auxiliary magnets are disposed along the circumference of the plasma formation chamber while a plurality of auxiliary magnets may also be arranged in the axial direction of the plasma formation chamber. Also, the magnetic poles of every auxiliary magnet are respectively reverse in polarity to the adjoining magnetic poles of an auxiliary magnet(s) disposed adjacent thereto either along the circumference of the plasma formation chamber or in the axial direction thereof. This enables the whole high-density plasma to be substantially uniform throughout the inside of the plasma formation chamber.

公开(公告)号：US08378576B2

公开(公告)日：2013-02-19

申请号：US12897400

申请日：2010-10-04

申请人： Einstein Noel Abarra ,  Yasushi Miura ,  Eiji Fujiyama ,  Naoyuki Suzuki ,  Yasuyuki Taneda ,  Yasushi Kamiya

发明人： Einstein Noel Abarra ,  Yasushi Miura ,  Eiji Fujiyama ,  Naoyuki Suzuki ,  Yasuyuki Taneda ,  Yasushi Kamiya

IPC分类号： H05B31/26

CPC分类号： H01J27/08

摘要： [Objection of the invention]An ion beam generator, a thermal distortion in a grid assembly is reduced. [Structure to solve the objection]Thermal expansion coefficients αP, αM and αG, for a sidewall (1A) of a discharge chamber, mounting platform (40) and extraction grid electrode assembly (20) are selected to have a relation: αP>αM≧αG. For example, the material of discharge chamber sidewall is stainless steel o aluminum, the material of grids is Mo, W or C and the material of platform is Ti or Mo.

摘要翻译： 本发明的目的在于减少电网组件中的热变形的离子束发生器。 [解决异议的结构]选择放电室，安装台（40）和提取栅极电极组件（20）的侧壁（1A）的热膨胀系数αP，αM和αG具有以下关系：αP>αM ≧αG。 例如，放电室侧壁的材料为不锈钢铝，栅格材料为Mo，W或C，平台材料为Ti或Mo。

公开(公告)号：US20110139998A1

公开(公告)日：2011-06-16

申请号：US12897400

申请日：2010-10-04

申请人： Einstein Noel ABARRA ,  Yasushi MIURA ,  Eiji FUJIYAMA ,  Naoyuki SUZUKI ,  Yasuyuki TANEDA ,  Yasushi KAMIYA

发明人： Einstein Noel ABARRA ,  Yasushi MIURA ,  Eiji FUJIYAMA ,  Naoyuki SUZUKI ,  Yasuyuki TANEDA ,  Yasushi KAMIYA

IPC分类号： H01J27/00

CPC分类号： H01J27/08

摘要： [Objective of the Invention] An ion beam generator, a thermal distortion in a grid assembly is reduced.[Structure to Solve the Objective] Thermal expansion coefficients αP, αM and αG, for a sidewall (1A) of a discharge chamber, mounting platform (40) and extraction grid electrode assembly (20) are selected to have a relation: αP>αM≧αG. For example, the material of discharge chamber sidewall is stainless steel o aluminum, the material of grids is Mo, W or C and the material of platform is Ti or Mo.

摘要翻译： 本发明的目的在于减少栅组件中的热变形的离子束发生器。 [解决目的的结构]选择排出室，安装台（40）和提取栅极电极组件（20）的侧壁（1A）的热膨胀系数αP，αM和αG具有以下关系：αP>αM ≧αG。 例如，放电室侧壁的材料为不锈钢铝，栅格材料为Mo，W或C，平台材料为Ti或Mo。