发明申请
US20110143054A1 USE OF A TARGET FOR SPARK EVAPORATION, AND METHOD FOR PRODUCING A TARGET SUITABLE FOR SAID USE
有权
使用目标来进行火山喷发，以及生产符合使用目标的方法
- 专利标题： USE OF A TARGET FOR SPARK EVAPORATION, AND METHOD FOR PRODUCING A TARGET SUITABLE FOR SAID USE
- 专利标题（中）： 使用目标来进行火山喷发，以及生产符合使用目标的方法
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申请号： US13059257申请日： 2009-08-10
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公开(公告)号： US20110143054A1公开(公告)日： 2011-06-16
- 发明人: Denis Kurapov , Markus Lechthaler
- 申请人： Denis Kurapov , Markus Lechthaler
- 申请人地址： CH Trubbach
- 专利权人： OERLIKON TRADING AG, TRÜBBACH
- 当前专利权人： OERLIKON TRADING AG, TRÜBBACH
- 当前专利权人地址： CH Trubbach
- 优先权： EP08014592.3 20080817; EP08017715.7 20081009
- 国际申请： PCT/EP2009/005803 WO 20090810
- 主分类号： C23C26/00
- IPC分类号： C23C26/00 ; B05D5/06
摘要：
The invention relates to a method for using a target for a coating process of metal oxide and/or metal nitride coatings by means of spark evaporation, wherein the target can be operated at a temperature that is higher than the melting point of the metal used in the target, and wherein the target is comprised of a metal whose oxides and/or nitrides are not electrically conducting. The invention further relates to the use of a target for producing metal oxide coatings and/or metal nitride coatings by means of spark evaporation, wherein the target has a matrix comprised of a metal, in which matrix non electrically conducting oxides and/or nitrides of the metal are embedded.
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