发明申请
US20110147198A1 VACUUM PUMPING SYSTEM, OPERATING METHOD OF VACUUM PUMPING SYSTEM, REFRIGERATOR, VACUUM PUMP, OPERATING METHOD OF REFRIGERATOR, OPERATION CONTROL METHOD OF TWO-STAGE TYPE REFRIGERATOR, OPERATION CONTROL METHOD OF CRYOPUMP, TWO-STAGE TYPE REFRIGERATOR, CRYOPUMP, SUBSTRATE PROCESSING APPARATUS, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
审中-公开
真空泵系统，真空泵系统的操作方法，制冷器，真空泵，制冷器的操作方法，两级制冷机的操作控制方法，制冰机的操作控制方法，两级制冷机，起动器，基板处理装置和 电子器件的制造方法
- 专利标题： VACUUM PUMPING SYSTEM, OPERATING METHOD OF VACUUM PUMPING SYSTEM, REFRIGERATOR, VACUUM PUMP, OPERATING METHOD OF REFRIGERATOR, OPERATION CONTROL METHOD OF TWO-STAGE TYPE REFRIGERATOR, OPERATION CONTROL METHOD OF CRYOPUMP, TWO-STAGE TYPE REFRIGERATOR, CRYOPUMP, SUBSTRATE PROCESSING APPARATUS, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
- 专利标题（中）： 真空泵系统，真空泵系统的操作方法，制冷器，真空泵，制冷器的操作方法，两级制冷机的操作控制方法，制冰机的操作控制方法，两级制冷机，起动器，基板处理装置和 电子器件的制造方法
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申请号： US13037819申请日： 2011-03-01
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公开(公告)号： US20110147198A1公开(公告)日： 2011-06-23
- 发明人: Takahiro Okada , Kazutoshi Aoki , Hisayoshi Komai
- 申请人： Takahiro Okada , Kazutoshi Aoki , Hisayoshi Komai
- 申请人地址： JP Kawasaki-shi
- 专利权人： CANON ANELVA CORPORATION
- 当前专利权人： CANON ANELVA CORPORATION
- 当前专利权人地址： JP Kawasaki-shi
- 优先权： JP2008-253916 20080930; JP2008-253919 20080930
- 主分类号： B01D8/00
- IPC分类号： B01D8/00 ; C23C14/34
摘要：
A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in a low-pressure state is adiabatically compressed when the interior of a cylinder shifts from the low-pressure state to a high-pressure state as a result of a valve operation of the refrigerator, and a process in which a displacer passes through the adiabatically compressed gas. At least another one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in the high-pressure state is adiabatically expanded when the interior of the cylinder shifts from the high-pressure state to the low-pressure state as a result of the valve operation of the refrigerator, and a process in which the displacer passes through the adiabatically expanded gas.
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