CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP
    1.
    发明申请
    CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP 审中-公开
    CRYOTRAP和真空加工设备与CRYOTRAP

    公开(公告)号:US20100011783A1

    公开(公告)日:2010-01-21

    申请号:US12446675

    申请日:2008-05-13

    CPC分类号: F04B37/08

    摘要: A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body 6 and the exhaust panel. The mechanism which performs thermal connection/disconnection has a movable unit which has a good heat conductivity and can come into contact with and separate from the exhaust panel and the cooling storage body.

    摘要翻译: 设置在真空容器中的冷冻机,具有通过冷却而冷凝和排出气体的排气板,与冷藏库连接并冷却的冷却段,包括固定在冷却台上的冷却库,同时保持 与其热接触,以及将冷却储存体6和排气板热连接/断开的机构。 进行热连接/断开的机构具有导热性良好并且可以与排气板和冷却储存体接触并分离的可动单元。

    VACUUM PUMPING SYSTEM, SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND OPERATING METHOD OF VACUUM PUMPING SYSTEM
    2.
    发明申请
    VACUUM PUMPING SYSTEM, SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND OPERATING METHOD OF VACUUM PUMPING SYSTEM 审中-公开
    真空泵送系统,基板处理装置,电子装置的制造方法和真空泵送系统的操作方法

    公开(公告)号:US20110162959A1

    公开(公告)日:2011-07-07

    申请号:US13048385

    申请日:2011-03-15

    IPC分类号: B01D8/00 C23C14/34

    摘要: A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs repeating an operation including a process in which a gas in a low-pressure state is adiabatically compressed when the interior of a cylinder shifts from the low-pressure state to a high-pressure state as a result of a valve operation of the refrigerator, and a process in which a displacer passes through the adiabatically compressed gas. At least another one of the plurality of vacuum pumps performs repeating an operation including a process in which a gas in the high-pressure state is adiabatically expanded when the interior of the cylinder shifts from the high-pressure state to the low-pressure state as a result of the valve operation of the refrigerator, and a process in which the displacer passes through the adiabatically expanded gas.

    摘要翻译: 每个具有冰箱的多个真空泵连接到公共压缩机。 多个真空泵中的至少一个执行重复操作,包括当气缸的内部从低压状态转变为高压状态时将低压状态的气体绝热压缩的过程,作为 冰箱的阀门操作的结果,以及置换器通过绝热压缩气体的过程。 多个真空泵中的至少另一个执行重复操作,包括当气缸内部从高压状态转变为低压状态时将高压状态的气体绝热膨胀的过程,作为 冰箱的阀操作的结果,以及置换器通过绝热膨胀气体的过程。