发明申请
- 专利标题: NONVOLATILE SEMICONDUCTOR MEMORY DEVICE
- 专利标题(中): 非易失性半导体存储器件
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申请号: US12717499申请日: 2010-03-04
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公开(公告)号: US20110147818A1公开(公告)日: 2011-06-23
- 发明人: Ryota KATSUMATA , Yoshiaki Fukuzumi , Masaru Kidoh , Masaru Kito , Hideaki Aochi
- 申请人: Ryota KATSUMATA , Yoshiaki Fukuzumi , Masaru Kidoh , Masaru Kito , Hideaki Aochi
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-286863 20091217
- 主分类号: H01L27/105
- IPC分类号: H01L27/105
摘要:
A nonvolatile semiconductor memory device includes: a substrate; a memory multilayer body with a plurality of insulating films and electrode films alternately stacked therein, the memory multilayer body being provided on a memory array region of the substrate; a semiconductor pillar buried in the memory multilayer body and extending in stacking direction of the insulating films and the electrode films; a charge storage film provided between one of the electrode films and the semiconductor pillar; a dummy multilayer body with a plurality of the insulating films and the electrode films alternately stacked therein and a dummy hole formed therein, the dummy multilayer body being provided on a peripheral circuit region of the substrate; an insulating member buried in the dummy hole; and a contact buried in the insulating member and extending in the stacking direction.
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