发明申请
- 专利标题: CAPACITOR AND A METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 电容器及其制造方法
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申请号: US13061121申请日: 2009-08-11
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公开(公告)号: US20110147891A1公开(公告)日: 2011-06-23
- 发明人: Yukiko Furukawa , Jinesh Balakrishna Pillai Kochupurackal , Johan Hendrik Klootwijk , Frank Pasveer
- 申请人: Yukiko Furukawa , Jinesh Balakrishna Pillai Kochupurackal , Johan Hendrik Klootwijk , Frank Pasveer
- 申请人地址: NL Eindhoven
- 专利权人: NXP B.V.
- 当前专利权人: NXP B.V.
- 当前专利权人地址: NL Eindhoven
- 优先权: EP08105131.0 20080826
- 国际申请: PCT/IB2009/053532 WO 20090811
- 主分类号: H01L29/94
- IPC分类号: H01L29/94 ; H01L21/02 ; H01L29/92
摘要:
A capacitor (110), wherein the capacitor (110) comprises a capacitor dielectric (112) comprising a dielectric matrix (114) of a first value of permittivity, and a plurality of nanoclusters (116) of a second value of permittivity which is larger than the first value of permittivity which are at least partially embedded in the dielectric matrix (114), wherein the plurality of nanoclusters (116) are formed in the dielectric matrix (114) by spontaneous nucleation.
公开/授权文献
- US08697516B2 Capacitor and a method of manufacturing the same 公开/授权日:2014-04-15