发明申请
US20110150261A1 CAPACITIVE TRANSDUCER AND FABRICATION METHOD 有权
电容式传感器和制造方法

CAPACITIVE TRANSDUCER AND FABRICATION METHOD
摘要:
A capacitive transducer and fabrication method are disclosed. The capacitive transducer includes a substrate, a first electrode mounted on the substrate, a cap having a through-hole and a cavity beside the through-hole, a second electrode mounted on the cap across the through-hole. The second electrode is deformable in response to pressure fluctuations applied thereto via the through-hole and defines, together with the first electrode, as a capacitor. The capacitor includes a capacitance variable with the pressure fluctuations and the cavity defines a back chamber for the deformable second electrode.
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