发明申请
- 专利标题: AROMATIC RING-CONTAINING COMPOUND FOR A RESIST UNDERLAYER AND RESIST UNDERLAYER COMPOSITION
- 专利标题(中): 含有芳香环的化合物用于耐下层和耐下层组合物
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申请号: US12980584申请日: 2010-12-29
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公开(公告)号: US20110155944A1公开(公告)日: 2011-06-30
- 发明人: Sung-Wook Cho , Hwan-Sung Cheon , Min-Soo Kim , Seung-Bae Oh , Jee-Yun Song
- 申请人: Sung-Wook Cho , Hwan-Sung Cheon , Min-Soo Kim , Seung-Bae Oh , Jee-Yun Song
- 优先权: KR10-2009-0136187 20091231
- 主分类号: H01B1/12
- IPC分类号: H01B1/12 ; C07C33/36 ; C07C33/26 ; H01F1/00
摘要:
An aromatic ring-containing compound for a resist underlayer and a resist underlayer composition, the aromatic ring-containing compound being represented by the following Chemical Formula 1: wherein, in Chemical Formula 1, R1 to R6 are each independently a substituted or unsubstituted C1 to C10 alkyl group, a substituted or unsubstituted C5 to C20 aromatic ring group, a substituted or unsubstituted C3 to C20 cycloalkyl group, a substituted or unsubstituted C3 to C20 cycloalkenyl group, a substituted or unsubstituted C2 to C20 heteroaryl group, or a substituted or unsubstituted C2 to C20 heterocycloalkyl group, X1 to X6 are each independently hydrogen, a hydroxy group (—OH), a substituted or unsubstituted alkyl amine group, a substituted or unsubstituted alkoxy group, or an amino group (—NH2), n1 to n6 are each independently 0 or 1, and 1≦n1+n2+n3+n4+n5+n6≦6.
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