发明申请
- 专利标题: ACOUSTIC WAVE DEVICE, AND FILTER AND DUPLEXER USING THE SAME
- 专利标题(中): 声波装置,以及使用它的滤波器和双工器
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申请号: US12976030申请日: 2010-12-22
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公开(公告)号: US20110156837A1公开(公告)日: 2011-06-30
- 发明人: Takashi INOUE , Hidekazu Nakanishi , Hiroyuki Nakamura , Shun-ichi Seki , Shoji Okamoto
- 申请人: Takashi INOUE , Hidekazu Nakanishi , Hiroyuki Nakamura , Shun-ichi Seki , Shoji Okamoto
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 优先权: JPJP2009-291716 20091224
- 主分类号: H03H9/70
- IPC分类号: H03H9/70
摘要:
An acoustic wave device includes a piezoelectric substrate, an IDT electrode provided on the piezoelectric substrate, a dielectric layer provided so as to cover the IDT electrode, and a first stress relaxation layer provided on the dielectric layer. Furthermore, the acoustic wave device includes an extraction electrode connected to the IDT electrode and extracted onto the first stress relaxation layer, and a bump provided on the extraction electrode. An elastic modulus of the first stress relaxation layer is smaller than that of the dielectric layer.