发明申请
- 专利标题: INTEGRATED CIRCUIT LINE WITH ELECTROMIGRATION BARRIERS
- 专利标题(中): 集成电路与电气障碍
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申请号: US12652485申请日: 2010-01-05
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公开(公告)号: US20110163450A1公开(公告)日: 2011-07-07
- 发明人: David V. Horak , Takeshi Nogami , Shom Ponoth , Chih-Chao Yang
- 申请人: David V. Horak , Takeshi Nogami , Shom Ponoth , Chih-Chao Yang
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L23/50
- IPC分类号: H01L23/50 ; H01L21/768
摘要:
A method for fabricating an integrated circuit comprising an electromigration barrier in a line of the integrated circuit includes forming a spacer; forming a segmented line adjacent to opposing sides of the spacer, the segmented line formed from a first conductive material; removing the spacer to form an empty line break; and filling the empty line break with a second conductive material to form an electromigration barrier that isolates electromigration effects within individual segments of the segmented line. An integrated circuit comprising an electromigration barrier includes a line, the line comprising a first conductive material, the line further comprising a plurality of line segments separated by one or more electromigration barriers, wherein the one or more electromigration barriers comprise a second conductive material that isolates electromigration effects within individual segments of the line.
公开/授权文献
- US08211776B2 Integrated circuit line with electromigration barriers 公开/授权日:2012-07-03
信息查询
IPC分类: