发明申请
- 专利标题: CONSTRUCTION ELEMENT MADE OF A FERROMAGNETIC SHAPE MEMORY MATERIAL AND USE THEREOF
- 专利标题(中): 光致变形记忆材料的构造元件及其使用
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申请号: US12995618申请日: 2009-06-02
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公开(公告)号: US20110163745A1公开(公告)日: 2011-07-07
- 发明人: Sebastian Faehler , Michael Thomas , Oleg Heczko , Joerg Buschbeck , Jeffrey Mc Cord
- 申请人: Sebastian Faehler , Michael Thomas , Oleg Heczko , Joerg Buschbeck , Jeffrey Mc Cord
- 优先权: DE102008026297.8 20080602
- 国际申请: PCT/EP09/56739 WO 20090602
- 主分类号: G01R33/02
- IPC分类号: G01R33/02 ; H01L29/82
摘要:
The invention relates to the field of materials science and relates to a component, which can be used, for example, for microcomponents, microsensors and microactuators. The object of the present invention is to disclose a component in which a clearly greater relative length change occurs. The object is attained through a component of a ferromagnetic shape memory material, produced by a method in which at least one sacrificial layer is applied onto a single-crystalline or biaxially textured substrate, onto which sacrificial layer an epitaxial or textured layer of a ferromagnetic shape memory material with a layer thickness of ≦50 μm is applied, subsequently the sacrificial layer is removed at least partially, and during or after the layer application a structuring at least of the ferromagnetic shape memory material is realized such that an aspect ratio is achieved in which at least one length is greater by at least a factor of 3 than the thickness of the layer or the shortest dimension of the component.
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