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1.发明申请CONSTRUCTION ELEMENT MADE OF A FERROMAGNETIC SHAPE MEMORY MATERIAL AND USE THEREOF 有权光致变形记忆材料的构造元件及其使用公开(公告)号：US20110163745A1
公开(公告)日：2011-07-07
申请号：US12995618
申请日：2009-06-02
CPC分类号： H01L41/12 , F03G7/065 , H01L41/125 , H01L41/20 , H01L41/47
摘要： The invention relates to the field of materials science and relates to a component, which can be used, for example, for microcomponents, microsensors and microactuators. The object of the present invention is to disclose a component in which a clearly greater relative length change occurs. The object is attained through a component of a ferromagnetic shape memory material, produced by a method in which at least one sacrificial layer is applied onto a single-crystalline or biaxially textured substrate, onto which sacrificial layer an epitaxial or textured layer of a ferromagnetic shape memory material with a layer thickness of ≦50 μm is applied, subsequently the sacrificial layer is removed at least partially, and during or after the layer application a structuring at least of the ferromagnetic shape memory material is realized such that an aspect ratio is achieved in which at least one length is greater by at least a factor of 3 than the thickness of the layer or the shortest dimension of the component.
摘要翻译： 本发明涉及材料科学领域，涉及可用于例如微型部件，微型传感器和微型致动器的部件。 本发明的目的是公开其中发生明显更大的相对长度变化的部件。 该目的是通过铁磁形状记忆材料的一个部件来实现的，该方法是通过一种方法产生的，其中至少一个牺牲层被施加到单晶或双轴织构的衬底上，牺牲层上形成铁磁形状的外延或纹理化层 施加层厚度为＆lt; nlE;50μm的记忆材料，随后至少部分去除牺牲层，并且在层施加之间或之后，实现至少铁磁形状记忆材料的结构，使得实现纵横比 其中至少一个长度比层的厚度或部件的最短尺寸大至少3倍。
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2.发明授权Construction element made of a ferromagnetic shape memory material and use thereof 有权由铁磁形状记忆材料制成的结构元件及其用途公开(公告)号：US08786276B2
公开(公告)日：2014-07-22
申请号：US12995618
申请日：2009-06-02
IPC分类号： G01R33/02
CPC分类号： H01L41/12 , F03G7/065 , H01L41/125 , H01L41/20 , H01L41/47
摘要： The invention relates to the field of materials science and relates to a component, which can be used, for example, for microcomponents, microsensors and microactuators. The object of the present invention is to disclose a component in which a clearly greater relative length change occurs. The object is attained through a component of a ferromagnetic shape memory material, produced by a method in which at least one sacrificial layer is applied onto a single-crystalline or biaxially textured substrate, onto which sacrificial layer an epitaxial or textured layer of a ferromagnetic shape memory material with a layer thickness of ≦50 μm is applied, subsequently the sacrificial layer is removed at least partially, and during or after the layer application a structuring at least of the ferromagnetic shape memory material is realized such that an aspect ratio is achieved in which at least one length is greater by at least a factor of 3 than the thickness of the layer or the shortest dimension of the component.
摘要翻译： 本发明涉及材料科学领域，涉及可用于例如微型部件，微型传感器和微型致动器的部件。 本发明的目的是公开其中发生明显更大的相对长度变化的部件。 该目的是通过铁磁形状记忆材料的一个部件来实现的，该方法是通过一种方法产生的，其中至少一个牺牲层被施加到单晶或双轴织构的衬底上，牺牲层上形成铁磁形状的外延或纹理化层 施加层厚度为＆lt; nlE;50μm的记忆材料，随后至少部分去除牺牲层，并且在层施加之间或之后，实现至少铁磁形状记忆材料的结构，使得实现纵横比 其中至少一个长度比层的厚度或部件的最短尺寸大至少3倍。
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