发明申请
US20110168554A1 APPARATUS FOR TREATMENT OF SAMPLES FOR AUGER ELECTRONIC SPECTROMETER (AES) IN THE MANUFACTURE OF INTEGRATED CIRCUITS
审中-公开
用于处理集成电路制造中的AUGER电子光谱仪（AES）样品的设备
- 专利标题： APPARATUS FOR TREATMENT OF SAMPLES FOR AUGER ELECTRONIC SPECTROMETER (AES) IN THE MANUFACTURE OF INTEGRATED CIRCUITS
- 专利标题（中）： 用于处理集成电路制造中的AUGER电子光谱仪（AES）样品的设备
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申请号： US13070767申请日： 2011-03-24
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公开(公告)号： US20110168554A1公开(公告)日： 2011-07-14
- 发明人: QI HAU ZHANG , Ming Li , Chorng Shry Niou , Scott Liao
- 申请人： QI HAU ZHANG , Ming Li , Chorng Shry Niou , Scott Liao
- 申请人地址： CN Shanghai
- 专利权人： Semiconductor Manufacturing International (Shanghai) Corporation
- 当前专利权人： Semiconductor Manufacturing International (Shanghai) Corporation
- 当前专利权人地址： CN Shanghai
- 优先权： CN200510133003.3 20051227
- 主分类号： C23C14/34
- IPC分类号： C23C14/34
摘要：
An apparatus for treatment of a sample for the manufacture of integrated circuits includes a holder apparatus and a stage which is coupled to the holder apparatus. The stage is capable of holding a portion of a sample to be analyzed. The apparatus also includes a shield that is operably coupled to the stage to block a portion of the sample. The shield is capable of movement relative to the sample to block one or more portions of the sample. The shield is provided on a track member and is movable from a first spatial location to a second spatial location on the track member. The apparatus further includes an enclosure surrounding an entirety of the sample and the shield.
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