公开(公告)号：US20110168554A1

公开(公告)日：2011-07-14

申请号：US13070767

申请日：2011-03-24

申请人： QI HAU ZHANG ,  Ming Li ,  Chorng Shry Niou ,  Scott Liao

发明人： QI HAU ZHANG ,  Ming Li ,  Chorng Shry Niou ,  Scott Liao

IPC分类号： C23C14/34

CPC分类号： G01N23/2276 ,  H01L22/12

摘要： An apparatus for treatment of a sample for the manufacture of integrated circuits includes a holder apparatus and a stage which is coupled to the holder apparatus. The stage is capable of holding a portion of a sample to be analyzed. The apparatus also includes a shield that is operably coupled to the stage to block a portion of the sample. The shield is capable of movement relative to the sample to block one or more portions of the sample. The shield is provided on a track member and is movable from a first spatial location to a second spatial location on the track member. The apparatus further includes an enclosure surrounding an entirety of the sample and the shield.

摘要翻译： 用于处理用于制造集成电路的样品的装置包括保持装置和与保持装置连接的台。 该阶段能够容纳要分析的样品的一部分。 该装置还包括可操作地耦合到载物台以阻挡样品的一部分的屏蔽件。 屏蔽能够相对于样品移动以阻挡样品的一个或多个部分。 屏蔽件设置在轨道构件上并且可从轨道构件上的第一空间位置移动到第二空间位置。 该装置还包括围绕整个样品和屏蔽件的外壳。