发明申请
- 专利标题: Turbomolecular Pump with a Flexible Mount
- 专利标题(中): 具有柔性支架的涡轮分子泵
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申请号: US13119831申请日: 2009-09-21
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公开(公告)号: US20110176910A1公开(公告)日: 2011-07-21
- 发明人: Ulrich Schroeder , Maurice Brunet , Olivier Lemarchand
- 申请人: Ulrich Schroeder , Maurice Brunet , Olivier Lemarchand
- 申请人地址: FR Saint Marcel
- 专利权人: SOCIETE DE MECANIQUE MAGNETIQUE
- 当前专利权人: SOCIETE DE MECANIQUE MAGNETIQUE
- 当前专利权人地址: FR Saint Marcel
- 优先权: FR0856348 20080922
- 国际申请: PCT/FR09/51768 WO 20090921
- 主分类号: F01D1/36
- IPC分类号: F01D1/36
摘要:
The flexibly-mounted turbomolecular pump comprises a leaktight casing mounted on a structure via a mechanical damper, a vertical support driven by an electric motor, radial magnetic bearings, an axial magnetic bearing, radial detectors, an axial detector, an emergency mechanical bearing, and a control module comprising power supply circuits and servo-control circuits for the axial and radial magnetic bearings. The servo-control circuits present low stiffness and include filter circuits for defining a limited passband. The control module comprises a comparator unit for detecting abnormally large movements of the rotor from signals delivered by the axial and radial detectors, which movements are greater than predetermined thresholds. The servo-control circuits include a restabilization network and a unit for selectively activating the restabilization network during a predetermined duration after a time at which the crossing of at least one of the predetermined thresholds is detected during a movement of the rotor.
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