发明申请
- 专利标题： Assembly Comprising a Conditioning System and at Least One Object, a Conditioning System, a Lithographic Apparatus and Methods
- 专利标题（中）： 包括调节系统和至少一个对象的组装，调节系统，平版印刷设备和方法
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申请号： US13084372申请日： 2011-04-11
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公开(公告)号： US20110188049A1公开(公告)日： 2011-08-04
- 发明人: Ronald VAN DER HAM , Tjarko Adriaan Rudolf Van Empel , Herman Vogel , Niek Jacobus Johannes Roset
- 申请人： Ronald VAN DER HAM , Tjarko Adriaan Rudolf Van Empel , Herman Vogel , Niek Jacobus Johannes Roset
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 主分类号： G01B11/02
- IPC分类号： G01B11/02
摘要：
An assembly including a conditioning system and an object moveable into and/or out of an area to be conditioned is disclosed. The conditioning system has fluid outlet passages to supply conditioning fluid to the area to be conditioned and is configured to adjust outflow of the conditioning fluid from the fluid outlet passages depending on a position of the object.
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