- 专利标题： Methods of making copper selenium precursor compositions with a targeted copper selenide content and precursor compositions and thin films resulting therefrom
-
申请号： US12658204申请日： 2010-02-04
-
公开(公告)号： US20110189080A1公开(公告)日： 2011-08-04
- 发明人: Calvin J. Curtis , Alexander Miedaner , Marinus Franciscus Antonius Maria van Hest , David S. Ginley , Jennifer Leisch , Matthew Taylor , Billy J. Stanbery
- 申请人： Calvin J. Curtis , Alexander Miedaner , Marinus Franciscus Antonius Maria van Hest , David S. Ginley , Jennifer Leisch , Matthew Taylor , Billy J. Stanbery
- 主分类号： B05D5/12
- IPC分类号： B05D5/12 ; C01B19/04 ; H01L21/314 ; H01L21/36
摘要：
Precursor compositions containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semi-conductor applications. Methods of forming the precursor compositions using primary amine solvents and methods of forming the thin films wherein the selection of temperature and duration of heating controls the formation of a targeted species of copper selenide.
公开/授权文献
信息查询
