Invention Application
US20110191728A1 INTEGRATED CIRCUIT HAVING LINE END CREATED THROUGH USE OF MASK THAT CONTROLS LINE END SHORTENING AND CORNER ROUNDING ARISING FROM PROXIMITY EFFECTS
审中-公开
通过使用面板进行线路端接的集成电路，控制线路端接和来自接近效应的拐角环绕
- Patent Title: INTEGRATED CIRCUIT HAVING LINE END CREATED THROUGH USE OF MASK THAT CONTROLS LINE END SHORTENING AND CORNER ROUNDING ARISING FROM PROXIMITY EFFECTS
- Patent Title (中): 通过使用面板进行线路端接的集成电路，控制线路端接和来自接近效应的拐角环绕
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Application No.: US13087384Application Date: 2011-04-15
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Publication No.: US20110191728A1Publication Date: 2011-08-04
- Inventor: Chin-Cheng Yang , Chiao-Wen Yeh , Chih-Hao Huang
- Applicant: Chin-Cheng Yang , Chiao-Wen Yeh , Chih-Hao Huang
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Main IPC: G06F17/50
- IPC: G06F17/50
Abstract:
An integrated circuit that includes a line end created through use of a mask that controls line end shortening and corner rounding arising from proximity effects is provided. The mask includes a main feature having opaque and transmissive areas arranged to reflect a patterned feature of the line end, at least one of an opaque edge or a transmissive edge located at each end of the main feature, wherein the opaque edge has a set of transmissive assist features arranged therein such that the set of transmissive assist features align alternately with the transmissive areas of the main feature, and the transmissive edge has a set of opaque assist features arranged therein such that the set of opaque assist features align alternately with the opaque areas of the main feature.
Information query
