发明申请
- 专利标题: COMPOUND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 化合物半导体器件及其制造方法
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申请号: US13091322申请日: 2011-04-21
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公开(公告)号: US20110193096A1公开(公告)日: 2011-08-11
- 发明人: Tadahiro IMADA
- 申请人: Tadahiro IMADA
- 申请人地址: JP Kawasaki-shi
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 当前专利权人地址: JP Kawasaki-shi
- 主分类号: H01L29/205
- IPC分类号: H01L29/205 ; H01L21/338 ; B82Y99/00 ; B82Y40/00
摘要:
An n-type GaN layer (3), a GaN layer (7) formed over the n-type GaN layer (3), an n-type AlGaN layer (9) formed over the GaN layer (7), a gate electrode (15) and a source electrode (13) formed over the n-type AlGaN layer (9), a drain electrode (14) formed below the n-type GaN layer (3), and a p-type GaN layer (4) formed between the GaN layer (7) and the drain electrode (14) are provided.
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