发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- 专利标题(中): 半导体器件及制造半导体器件的方法
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申请号: US13021400申请日: 2011-02-04
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公开(公告)号: US20110193101A1公开(公告)日: 2011-08-11
- 发明人: Naoko YANASE , Shingo Masuko , Takaaki Yasumoto , Ryoichi Ohara , Yorito Kakiuchi , Takao Noda , Kenya Sano
- 申请人: Naoko YANASE , Shingo Masuko , Takaaki Yasumoto , Ryoichi Ohara , Yorito Kakiuchi , Takao Noda , Kenya Sano
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-027121 20100210
- 主分类号: H01L29/12
- IPC分类号: H01L29/12 ; H01L21/265
摘要:
According to one embodiment, a semiconductor device includes a SiC layer of a first conductivity type, a SiC region of a second conductivity type, and a conductive layer of the second conductivity type. The SiC layer of the first conductivity type has a hexagonal crystal structure. The SiC region of the second conductivity type is formed in a surface of the SiC layer. The conductive layer of the second conductivity type is provided on the SiC region and is in contact with a portion of the SiC region including SiC of a cubic crystal structure.
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