发明申请
- 专利标题: SILICON CHICKLET PEDESTAL
- 专利标题(中): 硅胶馅饼
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申请号: US13095973申请日: 2011-04-28
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公开(公告)号: US20110199109A1公开(公告)日: 2011-08-18
- 发明人: S. Jay Chey , Timothy C. Krywanczyk , Mohammed S. Shaikh , Matthew T. Tiersch , Cornelia Tsang
- 申请人: S. Jay Chey , Timothy C. Krywanczyk , Mohammed S. Shaikh , Matthew T. Tiersch , Cornelia Tsang
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: G01R31/02
- IPC分类号: G01R31/02 ; G01R1/067
摘要:
A silicon chicklet pedestal for use in a wafer-level test probe of a wafer is provided and includes a main body, first and second opposing faces, and an array of vias formed through the main body to extend between the first and second faces, through which pairs of leads, respectively associated with each via at the first and second faces, are electrically connectable to one another.
公开/授权文献
- US08595919B2 Silicon chicklet pedestal 公开/授权日:2013-12-03
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