发明申请
- 专利标题: OUT-OF-PLANE COMB-DRIVE ACCELEROMETER
- 专利标题(中): 超平面组合驱动加速度计
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申请号: US12709184申请日: 2010-02-19
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公开(公告)号: US20110203372A1公开(公告)日: 2011-08-25
- 发明人: Michael Foster
- 申请人: Michael Foster
- 申请人地址: US NJ Morristown
- 专利权人: HONEYWELL INTERNATIONAL INC.
- 当前专利权人: HONEYWELL INTERNATIONAL INC.
- 当前专利权人地址: US NJ Morristown
- 主分类号: G01P15/097
- IPC分类号: G01P15/097
摘要:
An out-of-plane comb-drive accelerometer. An example accelerometer linearizes a response. An example accelerometer includes one or more stators having a plurality of tines having a surface parallel to a surface of substrate. The tine surface is at a first distance from the surface of the substrate. A proof mass includes one or more rotors that include a plurality of rotor tines attached to an edge of the proof mass. The rotor tines are interleaved with corresponding ones of the stator tines. The rotor tines include a surface parallel to a surface of the substrate. The rotor tine surface is at a second distance from the surface of the substrate. The first distance and second distance are unequal by a threshold amount. Motion of the rotor relative to the stator in an out-of-plane direction provides a linear change in a capacitive value measured across the rotor and the stator.
公开/授权文献
- US08505380B2 Out-of plane comb-drive accelerometer 公开/授权日:2013-08-13
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