发明申请
- 专利标题: SEMICONDUCTOR STORAGE DEVICE
- 专利标题(中): 半导体存储设备
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申请号: US12882454申请日: 2010-09-15
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公开(公告)号: US20110221034A1公开(公告)日: 2011-09-15
- 发明人: Keizo Kawakita
- 申请人: Keizo Kawakita
- 申请人地址: JP Tokyo
- 专利权人: ELPIDA MEMORY, INC
- 当前专利权人: ELPIDA MEMORY, INC
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-214457 20090916
- 主分类号: H01L29/92
- IPC分类号: H01L29/92
摘要:
A semiconductor storage device comprises a peripheral circuit region including a wiring layer having wiring patterns, a cavity formed in a non-wiring region between the wiring patterns of the wiring layer, and an insulating film forming at least a part of a wall defining the cavity, and a memory cell region.
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