发明申请
- 专利标题： CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD, METHOD OF MANUFACTURING THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS
- 专利标题（中）： 结晶装置，结晶方法，制造薄膜晶体管的方法和制造有机发光显示装置的方法
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申请号： US12948418申请日： 2010-11-17
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公开(公告)号： US20110223698A1公开(公告)日： 2011-09-15
- 发明人: Seong-Hyun JIN , Young-Jin CHANG , Jae-Hwan OH , Won-Kyu LEE
- 申请人： Seong-Hyun JIN , Young-Jin CHANG , Jae-Hwan OH , Won-Kyu LEE
- 申请人地址： KR Yongin-city
- 专利权人： SAMSUNG MOBILE DISPLAY CO., LTD.
- 当前专利权人： SAMSUNG MOBILE DISPLAY CO., LTD.
- 当前专利权人地址： KR Yongin-city
- 优先权： KR10-2010-0021836 20100311
- 主分类号： H01L33/00
- IPC分类号： H01L33/00 ; H01L21/20 ; B05C9/08 ; B05D3/06 ; F21S4/00 ; H05B41/16
摘要：
Provided are a crystallization apparatus and method, which prevent cracks from being generated, a method of manufacturing a thin film transistor (TFT), and a method of manufacturing an organic light emitting display apparatus. The crystallization apparatus includes a chamber for receiving a substrate, a first flash lamp and a second flash lamp, which are disposed facing each other within the chamber, wherein amorphous silicon layers are disposed on a first surface of the substrate facing the first flash lamp and a second surface of the substrate facing the second flash lamp, respectively.
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