公开(公告)号：US20240017284A1

公开(公告)日：2024-01-18

申请号：US18138038

申请日：2023-04-22

Applicant: SEMES CO., LTD.

Inventor： Dae Sung KIM ,  Jae Hyun LIM ,  Kyo Sang YOON ,  Ho Jin JANG ,  A Rah CHO

IPC: B05C9/08

CPC classification number: B05C9/08

Abstract: An apparatus for processing a substrate includes a processing vessel disposed in a process chamber and including a processing space in which a substrate is accommodated; a liquid supply line configured to process the substrate by supplying processing liquid to the substrate in the processing space; an exhaust line connected to the processing vessel and configured to exhaust gas in the processing space; a spraying portion disposed on the exhaust line and configured to spray cleaning liquid to remove contaminants accumulated in the exhaust line; and a washing liquid discharge line branched from the exhaust line and including a suction portion therein to suction cleaning liquid waste including contaminants removed from the exhaust line by the cleaning liquid and to discharge the cleaning liquid waste to the outside.

公开(公告)号：US11664225B2

公开(公告)日：2023-05-30

申请号：US16245124

申请日：2019-01-10

Applicant: CANON KABUSHIKI KAISHA

Inventor： Jun Ota

IPC: B05C11/10 ,  H01L21/027 ,  B81C1/00 ,  G03F7/00 ,  B05C9/08 ,  B29C59/02

CPC classification number: H01L21/027 ,  B05C9/08 ,  B05C11/1021 ,  B29C59/02 ,  B81C1/00 ,  G03F7/0002

Abstract: An imprint apparatus forms imprint material using a mold on a substrate. The imprint apparatus includes a movable stage configured to hold the substrate, a supply portion configured to discharge the imprint material, and a control unit configured to cause the supply portion to discharge the imprint material while moving the stage so that the imprint material is supplied onto the substrate. The control unit controls discharge of the imprint material from the supply portion so that a target amount of the imprint material is arranged at a target position on the substrate, based on property information indicating a relation between a discharge amount of imprint material from the supply portion and a position on a target object where the imprint material is to be arranged.

公开(公告)号：US11333971B2

公开(公告)日：2022-05-17

申请号：US16408586

申请日：2019-05-10

Applicant: CANON KABUSHIKI KAISHA

Inventor： Kazuki Nakagawa

IPC: G03F7/00 ,  H01L21/027 ,  B29C59/02 ,  B05C9/08 ,  G03F7/20

Abstract: There is provided that an imprint apparatus that forms a pattern on a substrate by curing an imprint material in a state in which a mold and the imprint material on the substrate are in contact with each other, the apparatus including a control unit configured to control a movement of a stage configured to hold the substrate and the supplying of a gas by a gas supplying unit, wherein the control unit removes charges from the mold by starting the supplying of the gas by the gas supplying unit before starting to move the stage below a dispenser after the mold and the cured imprint material are separated, and making a peripheral member face the mold via the gas during the movement of the stage.

公开(公告)号：US11148157B2

公开(公告)日：2021-10-19

申请号：US16610141

申请日：2018-05-02

Applicant: I.M.A. INDUSTRIA MACCHINE AUTOMATICHE S.P.A.

Inventor： Nicola Gandolfi ,  Gjergj Darragjati

IPC: B05B13/02 ,  B01J2/12 ,  A23P20/18 ,  A23P20/15 ,  A61J3/00 ,  A23K20/20 ,  B05C5/00 ,  B05C9/08 ,  B05C11/08 ,  B05C13/00 ,  B01F13/10 ,  A23G3/34 ,  A23G3/26 ,  B05C3/08

Abstract: A coating apparatus and method are disclosed for coating tablets with a film, in which the tables transit through a drilled first container where they are coated, then exit the first container and are removed from a rotating element provided on the periphery of a plurality of removal members that are spaced angularly apart from one another, in which each removal member removes a quantity of tablets, raises the removed tables as far as a certain height and then discharges the tablets into a chute that conveys the tablets into a second rotating drilled container, with delicate transfer of the coated tablets from one container to the next.

公开(公告)号：US11059070B2

公开(公告)日：2021-07-13

申请号：US16332919

申请日：2017-09-05

Applicant: CHEMETALL GMBH

Inventor： Heinz Burock

IPC: B05C11/10 ,  B05C9/06 ,  B05C9/08 ,  B01F15/02 ,  B01F15/04 ,  B05C5/02

Abstract: Described herein is an apparatus for dynamic metering of sealant volumes, and also described herein is a corresponding method.
The apparatus of the invention includes two containers for sealant components; a first drive, which is connected to two devices, each of which is able to convey one of the sealant components from its container; a drive controller; a mixing unit for mixing the sealant components conveyed from the containers, having an opening for applying the sealant to a component; and also, additionally, a compensating container with a compensating volume; and a second drive, which is connected to a piston which reaches into the compensating volume of the compensating container.
The compensating container in this arrangement is connected to the mixing unit. The first drive and the second drive can be dynamically controlled jointly by the drive controller.

公开(公告)号：US20190169839A1

公开(公告)日：2019-06-06

申请号：US15829944

申请日：2017-12-03

Applicant: M-Fire Suppression, Inc.

Inventor： Stephen Conboy

IPC: E04B1/94 ,  B32B3/06 ,  B32B7/12 ,  B32B7/00 ,  B32B21/14 ,  B32B21/04 ,  B32B21/02 ,  B32B21/13 ,  B27N3/02 ,  B27N7/00 ,  B27N9/00 ,  B65B11/00 ,  B65B13/02 ,  E04B1/26 ,  E04C2/16 ,  E04C3/12 ,  E04C3/14 ,  E04C3/16 ,  E04C3/17 ,  E04C3/36 ,  B27M1/08 ,  B65G23/02 ,  F26B25/16 ,  B05C9/08 ,  B05B9/00 ,  B05C3/10 ,  B05D1/18

Abstract: A method of and system for producing Class-A fire-protected oriented strand board (OSB) sheets. Each Class-A fire-protected OSB sheet has: a core medium layer made of wood pump, binder and/or adhesive materials; a pair of OSB layers bonded to the core medium layer; a clean fire inhibiting chemical (CFIC) coating on the surface of each OSB layer, made from CFIC liquid applied to the surface by dipping the OSB sheet into the CFIC liquid in a dipping tank, allowing shallow surface absorption into the OSB layers and ends of the core medium layer at atmospheric pressure; and a moisture, fire and UV protection coating spray coated over the the CFIC coating to provide protection against moisture, fire and UV radiation from Sunlight, which is quickly dried by passing through a drying tunnel on the production line.

公开(公告)号：US10265720B2

公开(公告)日：2019-04-23

申请号：US15841746

申请日：2017-12-14

Applicant: SIKA TECHNOLOGY AG

Inventor： Bruce Baker

IPC: B05C11/02 ,  E04D15/06 ,  B05C3/12 ,  B05C3/08 ,  H01B13/32 ,  B05C11/10 ,  E04D15/04 ,  B05C9/08 ,  B05C9/04

Abstract: A device for coating material with resin and subsequently laying the material saturated with the resin onto a surface, the device comprising a vessel for retaining the resin, the vessel having a slot sized and configured so that the material is passable through the slot after being coated with resin retained in the vessel, and a first and a second roller being arranged on either side of the slot or behind the slot.

公开(公告)号：US20180345334A1

公开(公告)日：2018-12-06

申请号：US15610082

申请日：2017-05-31

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Wei Chang Cheng ,  Cheng-Kuang Chen ,  Chi-Hung Liao

IPC: B08B9/027 ,  B08B3/08 ,  B05C11/08 ,  B05C9/08 ,  H01L21/027

Abstract: Embodiments of the present disclosure relate to apparatus and methods for cleaning an exhaust path of a semiconductor process tool. One embodiment provides an exhaust pipe section and a pipe cleaning assembly connected between a semiconductor process tool and a factory exhaust. The pipe cleaning assembly includes a residue remover disposed in the exhaust pipe section. The residue remover is operable to move in the exhaust pipe section to dislodge accumulated materials from an inner surface of the exhaust pipe section.

公开(公告)号：US20180161804A1

公开(公告)日：2018-06-14

申请号：US15841746

申请日：2017-12-14

Applicant: SIKA TECHNOLOGY AG

Inventor： Bruce BAKER

IPC: B05C11/02 ,  B05C3/08 ,  H01B13/32 ,  B05C11/10 ,  B05C9/08 ,  B05C3/12 ,  E04D15/06 ,  B05C9/04

CPC classification number: B05C11/025 ,  B05C3/08 ,  B05C3/125 ,  B05C9/04 ,  B05C9/08 ,  B05C11/1047 ,  E04D15/04 ,  E04D15/06 ,  E04D2015/042 ,  H01B13/32

Abstract: A device for coating material with resin and subsequently laying the material saturated with the resin onto a surface, the device comprising a vessel for retaining the resin, the vessel having a slot sized and configured so that the material is passable through the slot after being coated with resin retained in the vessel, and a first and a second roller being arranged on either side of the slot or behind the slot.

公开(公告)号：US20170128976A1

公开(公告)日：2017-05-11

申请号：US15414664

申请日：2017-01-25

Applicant: NORDSON CORPORATION

Inventor： Stephen R. des Jardins ,  Alan R. Lewis ,  Yuriy Suhinin

IPC: B05C5/02 ,  B05B12/08 ,  G01K13/02 ,  B05C11/10 ,  G05D7/06 ,  G01F1/76 ,  B05B12/00 ,  B05C9/08

CPC classification number: B05C5/0225 ,  B05B12/006 ,  B05B12/087 ,  B05C5/02 ,  B05C9/08 ,  B05C11/02 ,  B05C11/1002 ,  B05C11/101 ,  B05C11/1013 ,  B05C11/1034 ,  G01F1/76 ,  G01K13/02 ,  G01K2013/024 ,  G05D7/0676

Abstract: Systems and methods related to dispensing fluid and controlling a dispensing operation. The system includes a fluid dispenser including an inlet and an outlet, the dispenser being operable to start and stop the flow of the fluid from the outlet onto a substrate. The system also includes a fluid supply reservoir adapted to hold the fluid, and having an outlet coupled in fluid communication with the inlet of the fluid dispenser to establish a flow path for the fluid between the fluid supply reservoir and the outlet of the fluid dispenser. The fluid supply reservoir further includes a pneumatic input coupled to an air flow path adapted to receive pressurized air for forcing the fluid from the outlet of the reservoir. An electronic air flow meter device is operatively coupled to the air flow path to produce electrical output signals.