发明申请
- 专利标题: FORMING AGENT FOR GATE INSULATING FILM OF THIN FILM TRANSISTOR
- 专利标题(中): 薄膜绝缘膜绝缘膜成型剂
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申请号: US13131807申请日: 2009-11-26
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公开(公告)号: US20110227056A1公开(公告)日: 2011-09-22
- 发明人: Shinichi Maeda , Takahiro Kishioka
- 申请人: Shinichi Maeda , Takahiro Kishioka
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-304765 20081128
- 国际申请: PCT/JP2009/069943 WO 20091126
- 主分类号: H01L51/30
- IPC分类号: H01L51/30 ; H01L21/31 ; H01L51/40 ; C08G73/06
摘要:
It is an object to provide a novel forming agent for a gate insulating film that not only provides high insulating properties for the gate insulating film but also takes account of the electric characteristics of a thin film transistor element. A forming agent for a gate insulating film of a thin film transistor characterized by comprising an oligomer compound or a polymer compound including a structural unit containing a pyrimidinetrione ring having a hydroxyalkyl-containing group as a substituent on a nitrogen atom; a gate insulating film formed by the forming agent; and a thin film transistor.
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