发明申请
- 专利标题: PHOTOELECTRIC CONVERSION APPARATUS AND IMAGING SYSTEM
- 专利标题(中): 光电转换装置和成像系统
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申请号: US13131442申请日: 2010-01-26
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公开(公告)号: US20110234868A1公开(公告)日: 2011-09-29
- 发明人: Yuichiro Yamashita , Takanori Watanabe , Mineo Shimotsusa , Takeshi Ichikawa
- 申请人: Yuichiro Yamashita , Takanori Watanabe , Mineo Shimotsusa , Takeshi Ichikawa
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-026700 20090206; JP2010-011375 20100121
- 国际申请: PCT/JP2010/051308 WO 20100126
- 主分类号: H04N5/335
- IPC分类号: H04N5/335 ; H01L27/144
摘要:
A photoelectric conversion apparatus comprises multiple photoelectric conversion portions (51) disposed in a semiconductor substrate (5B) wherein each photoelectric conversion portion (51) includes: a P-type charge accumulating area (107) containing a first impurity; and an N-type well portion (102) that, along with the P-type charge accumulating area, configures a photodiode, and each well portion has: an N-type first semiconductor region (102a) containing arsenic at a first density; an N-type second semiconductor region (102b,102C) disposed below the first semiconductor region and containing arsenic at a second density that is lower than the first density; and an N-type third semiconductor region (102d) disposed below the second semiconductor region and containing a second impurity at a third density that is higher than the first density.
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