发明申请
US20110236824A1 POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
有权
正电阻组合物和形成电阻图案的方法
- 专利标题: POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- 专利标题(中): 正电阻组合物和形成电阻图案的方法
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申请号: US12979067申请日: 2010-12-27
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公开(公告)号: US20110236824A1公开(公告)日: 2011-09-29
- 发明人: Tomoyuki HIRANO , Daiju SHIONO , Masatoshi ARAI
- 申请人: Tomoyuki HIRANO , Daiju SHIONO , Masatoshi ARAI
- 申请人地址: JP Kawasaki-shi
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JPP2010-000662 20100105
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; G03F7/20
摘要:
A positive resist composition including a base component (A) which exhibits increased solubility in an alkali developing solution under action of acid, an acid-generator component (B) which generates acid upon exposure and a fluorine-containing polymeric compound (C′) which generates acid upon exposure, the base component (A) having a structural unit (a0-1) represented by general formula (a0-1) and a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group, and the fluorine-containing polymeric compound (C′) having a structural unit (c0) which generates acid upon exposure and a structural unit (c1) represented by formula (c1) (wherein R2 represents a divalent linking group, R3 represents a cyclic group containing —SO2— within the ring skeleton, Q0 represents a single bond or a divalent linking group, and R0 represents an organic group which may have a fluorine atom).
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