发明申请
- 专利标题: CASCADED MICROMECHANICAL ACTUATOR STRUCTURE
- 专利标题(中): CASCADED微机械致动器结构
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申请号: US13124468申请日: 2009-08-24
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公开(公告)号: US20110248601A1公开(公告)日: 2011-10-13
- 发明人: Tjalf Pirk , Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
- 申请人: Tjalf Pirk , Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
- 优先权: DE102008042967.8 20081020
- 国际申请: PCT/EP2009/060865 WO 20090824
- 主分类号: H02N1/00
- IPC分类号: H02N1/00
摘要:
A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.
公开/授权文献
- US09195054B2 Cascaded micromechanical actuator structure 公开/授权日:2015-11-24
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