发明申请
US20110248601A1 CASCADED MICROMECHANICAL ACTUATOR STRUCTURE 有权
CASCADED微机械致动器结构

CASCADED MICROMECHANICAL ACTUATOR STRUCTURE
摘要:
A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.
公开/授权文献
信息查询
0/0